L. Peccoud

Statistics

Publications

Citations

191

H-Index

Active since

1989

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Direction de la Recherche Technologique

CEA Grenoble

Université Joseph Fourier

L. Peccoud is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in materials science, natural sciences, and physics.

Publications per year

1989–1995

Publications

Electrical characterization of radio-frequency parallel-plate capacitively coupled discharges

B. Andries, Guillaume Ravel, L. Peccoud · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 53 citations · Full text

Engineering, Electrical Engineering, Physics +15

Electrostatic Clamping Applied to Semiconductor Plasma Processing: I . Theoretical Modeling

J. ‐F. Daviet, L. Peccoud, F. Mondon · Journal of The Electrochemical Society · 1993 · 31 citations

Natural Sciences, Electrical Engineering, Physics +12

Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma

H. Macé, H. Achard, L. Peccoud · Microelectronic Engineering · 1995 · 24 citations

Natural Sciences, Materials Science, Physics +16

Device processing and integration of ferroelectric thin films for memory applications

H. Achard, H. Macé, L. Peccoud · Microelectronic Engineering · 1995 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

Deep and fast plasma etching for silicon micromachining

Mireille Francou, J.S. Danel, L. Peccoud · Sensors and Actuators A Physical · 1995 · 21 citations

Engineering, Electrical Engineering, Materials Science +11

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