Concepedia

J. ‐F. Daviet

J‐

Statistics

Publications

3

Citations

59

H-Index

3

Active since

1991

Affiliations

Université Joseph Fourier(Current)

J. ‐F. Daviet is an author at Université Joseph Fourier specializing in microelectronics, etching, and physics.

Publications per year

1991–1993

3

Publications

3

Electrostatic Clamping Applied to Semiconductor Plasma Processing: I . Theoretical Modeling

J. ‐F. Daviet, L. Peccoud, F. Mondon · Journal of The Electrochemical Society · 1993 · 31 citations

, , +12

Heat transfer in a microelectronics plasma reactor

J. ‐F. Daviet, L. Peccoud, F. Mondon · Journal of Applied Physics · 1993 · 14 citations

, , +17

X-ray photoelectron spectroscopy studies of contamination and cleaning of surfaces exposed to a fluorocarbon plasma

A. Ermolieff, S. Marthon, F. Bertin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 14 citations

, , +17

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