Reactively sputtered RuO2 thin film resistor with near zero temperature coefficient of resistance

Electrical properties and conduction mechanisms of Ru-based thick-film (cermet) resistors

G. E. Pike, C. H. Seager · Journal of Applied Physics · 1977 · 288 citations

Natural Sciences, Materials Engineering, Materials Science +17

Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization

L. Krusin‐Elbaum, M. Wittmer, D. S. Yee · Applied Physics Letters · 1987 · 154 citations

Natural Sciences, Materials Engineering, Materials Science +14

Reactively sputtered RuO2 diffusion barriers

E. Kolawa, F. C. T. So, E. T-S. Pan et al. · Applied Physics Letters · 1987 · 121 citations

Engineering, Materials Engineering, Materials Science +17

Electron Tunneling and Hopping Possibilites in RuO₂ Thick Films

N. C. Halder · Active and Passive Electronic Components · 1982 · 37 citations · Full text

Natural Sciences, Materials Science, Physics +17

Noise in Ru-based thick-film resistors

T.M. Chen, Sy-Haur Su, David Smith · Solid-State Electronics · 1982 · 27 citations

Engineering, Electrical Engineering, Materials Science +12