ELECTROFORMING TECHNIQUES IN THE LIGA PROCESS FOR THE PRODUCTION OF MICRODEVICES

Abstract

ABSTRACT At the Karlsruhe Nuclear Research Center a new technology, called LIGA process, is being developed. In this process, synchrotron radiation lithography, electroforming and plastic molding are employed for the fabrication of microdevices with characteristic dimensions of few micrometers and structural heights of several hundred micrometers. Besides the production of metallic microdevices made of nickel, copper or gold, electroforming techniques are also used in fabricating X-ray masks and mold inserts to be utilized in the process. Plating processes used In the LIGA process are being automated for integration in a new clean-room plating machine developed for the mass production of microdevices.