Journal of Crystal Growth · 2000 · 133 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDefects In Electronic MaterialsEtching ProcessesSemiconductor DefectsSemiconductor Device MaterialsWide Band Gap SemiconductorsWide-bandgap SemiconductorsEtch MechanismsEtch-induced DefectsEtchingGallium Nitride (Gan) MaterialsSelective Etching
15
Motoaki Iwaya, Tetsuya Takeuchi, Shigeo Yamaguchi et al. · Japanese Journal of Applied Physics · 1998 · 192 citations