Attenuation losses in electron cyclotron resonance plasma etched AlGaAs waveguides

Low-loss III-V semiconductor optical waveguides

R. J. Deri, E. Kapon · IEEE Journal of Quantum Electronics · 1991 · 162 citations

Engineering, Electrical Engineering, Materials Science +17

Plasma etching of III–V semiconductors in CH4/H2/Ar electron cyclotron resonance discharges

C. Constantine, D. Johnson, S. J. Pearton et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 111 citations

Engineering, Materials Engineering, Materials Science +17

<i>The Laser Guidebook</i>

Jeff Hecht, Donald C. Peckham · Physics Today · 1987 · 93 citations

Natural Sciences, Physics, Mathematical Physics +5

Identification of volatile products in low pressure hydrocarbon electron cyclotron resonance reactive ion etching of InP and GaAs

D. L. Melville, J.G. Simmons, D. A. Thompson · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 50 citations

Natural Sciences, Materials Science, Physics +14

High Rate Anisotropic Aluminum Etching

Richard H. Bruce, Geoffrey P. Malafsky · Journal of The Electrochemical Society · 1983 · 37 citations

Engineering, Materials Engineering, Materials Science +13