D. Johnson

Plasma etching of III–V semiconductors in CH4/H2/Ar electron cyclotron resonance discharges

C. Constantine, D. Johnson, S. J. Pearton et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 111 citations

Wide-bandgap Semiconductor, Engineering, Gaas Plasma +16

Aspect ratio dependent etching lag reduction in deep silicon etch processes

Shouliang Lai, D. Johnson, Russ Westerman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006 · 105 citations

Engineering, Vlsi Design, Electron-beam Lithography +19

A new Pitheciin primate from the middle Miocene of Argentina

Richard F. Kay, D. Johnson, D. Jeffrey Meldrum · American Journal of Primatology · 1998 · 71 citations

Biology, Natural Sciences, Mammalogy +15

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

S. J. Pearton, U. K. Chakrabarti, A. P. Kinsella et al. · Applied Physics Letters · 1990 · 62 citations

Electrical Engineering, Optical Materials, Engineering +13

Advanced selective dry etching of GaAs/AlGaAs in high density inductively coupled plasmas

J. W. Lee, M. Devre, B. H. Reelfs et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 50 citations

Wide-bandgap Semiconductor, Engineering, Algaas Layer +19