Statistics
Publications
344
Citations
11.7K
Authors
27
Location
Huntsville, United States
344
Inductively coupled plasma etching of GaN
R. J. Shul, G McClellan, S.A. Casalnuovo et al. · Applied Physics Letters · 1996 · 214 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–5 of 344
27
19
h-index
13
h-index
12
h-index
11
h-index
7
h-index
1–5 of 27