Concepedia

Shouliang Lai

SL

1

Publications

105

Citations

1

H-Index

2006

Active since

Shouliang Lai is an author specializing in instrumentation, electronic packaging, and integrated circuits.

Top concepts

3D PrintingEngineeringVlsi DesignApplied PhysicsInstrumentationMicroelectronicsMicrofabricationIntegrated CircuitsElectronic PackagingElectrical Engineering

Publications per year

2006–2006

1

Publications

1

Aspect ratio dependent etching lag reduction in deep silicon etch processes

Shouliang Lai, D. Johnson, Russ Westerman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006 · 105 citations

Engineering, Vlsi Design, Electron-beam Lithography +19

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