Concepedia

Russ Westerman

RW

2

Publications

119

Citations

2

H-Index

1999

Active since

Affiliations

University of Florida(Current)

Russ Westerman is an author at University of Florida specializing in applied physics, engineering, and integrated circuits.

Top concepts

EngineeringApplied PhysicsPhysics3D PrintingVlsi DesignInstrumentationSurface ScienceMaterial ScienceMicroelectronicsMicrofabrication

Publications per year

1999–2006

2

Publications

2

Aspect ratio dependent etching lag reduction in deep silicon etch processes

Shouliang Lai, D. Johnson, Russ Westerman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006 · 105 citations

Engineering, Vlsi Design, Electron-beam Lithography +19

Mechanism of high density plasma processes for ion-driven etching of materials

J.W. Lee, John F. Donohue, Kenneth D. Mackenzie et al. · Solid-State Electronics · 1999 · 14 citations

Materials Engineering, Materials Science, High Density +9

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