Sensors and Actuators B Chemical · 2000 · 46 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationDevice ModelingDevice SimulationIntegrated Circuit DesignSemiconductor Device MaterialsSemiconductor PhysicsField-effect Transistor SimulationMetal-oxide-semiconductor Field-effect Transistor ModelingMosfet ModelingPhysics-based Device ModelingSilicon Nitride
6