A low-temperature CVD process for silicon carbide MEMS

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

Engineering, Materials Engineering, Materials Science +17

Silicon carbide as a new MEMS technology

P.M. Sarro · Sensors and Actuators A Physical · 2000 · 416 citations

Engineering, Materials Engineering, Materials Science +14

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A. Zorman · Thin Solid Films · 1999 · 320 citations

Engineering, Materials Engineering, Materials Science +14

Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS

W. Robert Ashurst, Christina Yau, Carlo Carraro et al. · Sensors and Actuators A Physical · 2001 · 160 citations

Natural Sciences, Materials Engineering, Materials Science +15

Polysilicon microstructures to characterize static friction

Martin Lim, J.C. Chang, Darcy Schultz et al. · 2002 · 111 citations

Engineering, Materials Engineering, Materials Science +15