Publication | Closed Access
Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS
160
Citations
29
References
2001
Year
Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsPolysilicon MemsThin FilmsMulti-functional CoatingDepth-graded Multilayer CoatingProtective Coating
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