Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS

Alkyl Monolayers on Silicon Prepared from 1-Alkenes and Hydrogen-Terminated Silicon

Matthew R. Linford, Paul Fenter, P. Eisenberger et al. · Journal of the American Chemical Society · 1995 · 1.1K citations

Natural Sciences, Chemistry, Materials Science +12

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 830 citations

Engineering, Materials Engineering, Materials Science +17

Silanization of Solid Substrates: A Step Toward Reproducibility

Jean-Bruno Brzoska, Issam Ben Azouz, F. Rondelez · Langmuir · 1994 · 578 citations

Natural Sciences, Chemistry, Materials Science +8

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

Engineering, Materials Science, Mechanical Engineering +16

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

Engineering, Materials Engineering, Materials Science +17