A sub-micron particle filter in silicon

Wafer bonding for silicon-on-insulator technologies

J. B. Lasky · Applied Physics Letters · 1986 · 574 citations

Engineering, Electrical Engineering, Materials Science +17

Silicon-to-silicon direct bonding method

Masaru Shimbo, K. Furukawa, K. Fukuda et al. · Journal of Applied Physics · 1986 · 507 citations

Engineering, Materials Engineering, Materials Science +17

A Water-Amine-Complexing Agent System for Etching Silicon

R. M. Finne, D. L. Klein · Journal of The Electrochemical Society · 1967 · 309 citations

Engineering, Materials Engineering, Materials Science +17

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

Arnold Reisman, M. Berkenblit, S. A. Chan et al. · Journal of The Electrochemical Society · 1979 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon

A. Bohg · Journal of The Electrochemical Society · 1971 · 137 citations

Engineering, Materials Engineering, Materials Science +12