MEMS Filters is a microfabricated electromechanical system that selectively transmits or attenuates specific frequency components of electrical or mechanical signals by exploiting the resonant characteristics of miniaturized mechanical structures integrated within semiconductor-compatible substrates.
298
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12.7K
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822
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219
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2017–2026
48
Parents
Publications
298
Microelectromechanical filters for signal processing
Liwei Lin, Clark T.‐C. Nguyen, Roger T. Howe et al. · 1992 · 259 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +16
1–5 of 298
Authors
822
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22
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1–5 of 822
Institutions
219
University of Michigan
Ann Arbor, United States
23 h-index
70 publications
4.6K citations
University of California, Berkeley
Berkeley, United States
14 h-index
43 publications
3.3K citations
Carnegie Mellon University
Pittsburgh, United States
11 h-index
34 publications
1.6K citations
Purdue University West Lafayette
West Lafayette, United States
9 h-index
24 publications
1K citations
University of Illinois Urbana-Champaign
Urbana, United States
9 h-index
26 publications
1.1K citations
University of Pennsylvania
Philadelphia, United States
7 h-index
23 publications
1.9K citations
Centre National de la Recherche Scientifique
Paris, France
6 h-index
20 publications
392 citations
Massachusetts Institute of Technology
Cambridge, United States
6 h-index
14 publications
380 citations
1–8 of 219
Venues
- Journal of Microelectromechanical Systems
23 publications · 1.8K citations
20
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- Sensors and Actuators A Physical
20 publications · 904 citations
15
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- IEEE Transactions on Microwave Theory and Techniques
10 publications · 943 citations
10
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- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
9 publications · 187 citations
9
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- Electronics Letters
6 publications · 111 citations
6
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