Concepedia

R. M. Finne

RM

Statistics

Publications

2

Citations

329

H-Index

2

Active since

1963

Affiliations

IBM (United States)(Current)

R. M. Finne is an author at IBM (United States) specializing in surface science, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceThin FilmsMicrofluidicsElectrochemistryMicroelectronicsMicrofabricationSurface Technology

Publications per year

1963–1967

2

Publications

2

A Water-Amine-Complexing Agent System for Etching Silicon

R. M. Finne, D. L. Klein · Journal of The Electrochemical Society · 1967 · 308 citations

Materials Science, Chemical Engineering, Wafer Scale Processing +15

An Electropolishing Technique for Germanium and Silicon

Miles V. Sullivan, D. L. Klein, R. M. Finne et al. · Journal of The Electrochemical Society · 1963 · 21 citations

Engineering, Silicon On Insulator, Electrochemical Technique +19

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