Concepedia

D. L. Klein

DL

Statistics

Publications

5

Citations

416

H-Index

5

Active since

1962

Affiliations

IBM (United States)(Current)

D. L. Klein is an author at IBM (United States) specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringElectronic PackagingChemistryThin Films

Publications per year

1962–1967

5

Publications

5

A Water-Amine-Complexing Agent System for Etching Silicon

R. M. Finne, D. L. Klein · Journal of The Electrochemical Society · 1967 · 308 citations

Materials Science, Chemical Engineering, Wafer Scale Processing +15

Controlled Etching of Silicon in the HF-HNO[sub 3] System

D. L. Klein, D. J. D'Stefan · Journal of The Electrochemical Society · 1962 · 55 citations

Materials Science, Wafer Scale Processing, Engineering +12

An Electropolishing Technique for Germanium and Silicon

Miles V. Sullivan, D. L. Klein, R. M. Finne et al. · Journal of The Electrochemical Society · 1963 · 21 citations

Engineering, Silicon On Insulator, Electrochemical Technique +19

Temporary Protection of Silicon Surfaces by Iodine Films

Robert Lieberman, D. L. Klein · Journal of The Electrochemical Society · 1966 · 19 citations

Materials Science, Engineering, Microfabrication +7

The Photochemistry of Coordination Compounds in Solution. I. Tris(ethylenediamine)cobalt(III) Chloride

D. L. Klein, Carl W. Moeller · Inorganic Chemistry · 1965 · 13 citations

Altmetrics, Inorganic Chemistry, Chemical Engineering +13

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