A. Bohg

Oxygen precipitation in silicon

W. Patrick, E. E. Hearn, W. A. Westdorp et al. · Journal of Applied Physics · 1979 · 440 citations

Materials Science, Precipitate Particles, Engineering +10

Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon

A. Bohg · Journal of The Electrochemical Society · 1971 · 137 citations

Materials Science, Plasma Etching, Boron-doped Silicon +1

Influence of film stress and thermal oxidation on the generation of dislocations in silicon

A. Bohg, A. K. Gaind · Applied Physics Letters · 1978 · 39 citations

Point Defects, Cumulative Effect, Engineering +18

Framed Recessed Oxide Scheme for Dislocation‐Free Planar Si Structures

I. Magdo, A. Bohg · Journal of The Electrochemical Society · 1978 · 20 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Measurement of stresses in thin films on single crystalline substrates

A. Bohg · physica status solidi (a) · 1978 · 18 citations

Materials Science, Engineering, Strain Localization +14