Interfacial properties of AlN and oxidized AlN on Si

Marcel Placidi, Amador Pérez‐Tomás, J. C. Moreno, Éric Frayssinet, F. Sèmond, A. Constant, Philippe Godignon, N. Mestres, Anna Crespi, José del R. Millán

Surface Science · 2009 · 16 citations · 21 references

Concepts

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