Concepedia

V. Cimalla

VC

144

Publications

5.5K

Citations

40

H-Index

1995

Active since

Affiliations

Technische Universität Ilmenau(Current)

Fraunhofer Institute for Applied Solid State Physics

Foundation for Research and Technology Hellas

University of Freiburg

Cornell University

V. Cimalla is an author at Technische Universität Ilmenau specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceElectrical EngineeringThin FilmsNanotechnologyNanoelectronicsMaterials EngineeringPhysics

Publications per year

1995–2024

144

Publications

144

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

V. Cimalla, J. Pezoldt, O. Ambacher · Journal of Physics D Applied Physics · 2007 · 385 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Zinc oxide as an ozone sensor

Rodrigo Martins, Elvira Fortunato, Patrı́cia Nunes et al. · Journal of Applied Physics · 2004 · 202 citations

Environmental Monitoring, Engineering, Atmospheric Photochemistry +17

Piezoelectric properties of polycrystalline AlN thin films for MEMS application

Katja Tonisch, V. Cimalla, Ch. Foerster et al. · Sensors and Actuators A Physical · 2006 · 202 citations

Materials Science, Electrical Engineering, Engineering +8

Phase Stabilization and Phonon Properties of Single Crystalline Rhombohedral Indium Oxide

Ch. Y. Wang, Ye Dai, J. Pezoldt et al. · Crystal Growth & Design · 2008 · 127 citations

Materials Science, Material Analysis, Engineering +15

Dependence of the photoreduction and oxidation behavior of indium oxide films on substrate temperature and film thickness

Marcus Bender, N. Katsarakis, E. Gagaoudakis et al. · Journal of Applied Physics · 2001 · 117 citations

Materials Science, Indium Oxide, Chemical Engineering +14

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