Katja Tonisch

Piezoelectric properties of polycrystalline AlN thin films for MEMS application

Katja Tonisch, V. Cimalla, Ch. Foerster et al. · Sensors and Actuators A Physical · 2006 · 208 citations

Engineering, Materials Engineering, Materials Science +16

Nanoelectromechanical devices for sensing applications

V. Cimalla, Florentina Niebelschütz, Katja Tonisch et al. · Sensors and Actuators B Chemical · 2006 · 96 citations

Engineering, Materials Engineering, Materials Science +12

AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility

I. Cimalla, Florentina Will, Katja Tonisch et al. · Sensors and Actuators B Chemical · 2006 · 82 citations

Engineering, Materials Engineering, Materials Science +14

High-Frequency Performance of GaN High-Electron Mobility Transistors on 3C-SiC/Si Substrates With Au-Free Ohmic Contacts

Wael Jatal, Uwe Baumann, Katja Tonisch et al. · IEEE Electron Device Letters · 2014 · 51 citations

Engineering, Electrical Engineering, Materials Science +17

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

K. Brueckner, F. Niebelschuetz, Katja Tonisch et al. · physica status solidi (a) · 2010 · 49 citations

Engineering, Materials Engineering, Materials Science +17