Katja Tonisch

Piezoelectric properties of polycrystalline AlN thin films for MEMS application

Katja Tonisch, V. Cimalla, Ch. Foerster et al. · Sensors and Actuators A Physical · 2006 · 202 citations

Materials Science, Electrical Engineering, Engineering +8

Nanoelectromechanical devices for sensing applications

V. Cimalla, Florentina Niebelschütz, Katja Tonisch et al. · Sensors and Actuators B Chemical · 2006 · 96 citations

Engineering, Sensors, Applied Physics +4

AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility

I. Cimalla, Florentina Will, Katja Tonisch et al. · Sensors and Actuators B Chemical · 2006 · 80 citations

Engineering, Nanotechnology, Surface Science +6

High-Frequency Performance of GaN High-Electron Mobility Transistors on 3C-SiC/Si Substrates With Au-Free Ohmic Contacts

Wael Jatal, Uwe Baumann, Katja Tonisch et al. · IEEE Electron Device Letters · 2014 · 51 citations

Semiconductors, Materials Science, Electrical Engineering +15

Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications

K. Brueckner, F. Niebelschuetz, Katja Tonisch et al. · physica status solidi (a) · 2010 · 48 citations

Wide-bandgap Semiconductor, Nanosensors, Engineering +24