Publication | Closed Access
Piezoelectric properties of polycrystalline AlN thin films for MEMS application
202
Citations
14
References
2006
Year
Materials ScienceElectrical EngineeringEngineeringApplied PhysicsPiezoelectric PropertiesPiezoelectricityPiezoelectric MaterialThin Film Process TechnologyThin FilmsMicroelectronicsMicro-electromechanical System
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