<i>In-situ</i> scanning electron microscopy study of fracture events during back-end-of-line microbeam bending tests

Abstract

This paper demonstrates the direct observation of crack initiation, crack propagation, and interfacial delamination events during in-situ microbeam bending tests of FIB milled BEOL structures. The elastic modulus and the critical force of fracture of the BEOL beam samples were compared for beams of different length and width.