Chen Wu

Interconnect metals beyond copper: reliability challenges and opportunities

Kristof Croes, Christoph Adelmann, Christopher Wilson et al. · 2018 · 83 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects

Olalla Varela Pedreira, Kristof Croes, A. Leśniewska et al. · 2017 · 77 citations

Reliability Study, Engineering, Beol Interconnects +17

Electrical Reliability Challenges of Advanced Low-k Dielectrics

Chen Wu, Y. Li, Mikhaı̈l R. Baklanov et al. · ECS Journal of Solid State Science and Technology · 2014 · 59 citations · Full text

Dielectrics, Engineering, Porogen Precursors +18

Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus

Kris Vanstreels, Chen Wu, Mario González et al. · Langmuir · 2013 · 53 citations

Engineering, Nanoporous Material, Measured Elastic Modulus +16

Mechanical Stability of Porous Low-k Dielectrics

Kris Vanstreels, Chen Wu, Mikhaı̈l R. Baklanov · ECS Journal of Solid State Science and Technology · 2014 · 47 citations · Full text

Dielectrics, Engineering, Mechanical Stability +17