Characteristics of mask layer on (100) silicon induced by tribo-nanolithography with diamond tip cantilevers based on AFM

"Dip-Pen" Nanolithography

Richard D. Piner, Jin Zhu, Feng Xu et al. · Science · 1999 · 3K citations

Natural Sciences, Materials Engineering, Materials Science +15

Nanotubes as nanoprobes in scanning probe microscopy

Hongjie Dai, Jason H. Hafner, Andrew G. Rinzler et al. · Nature · 1996 · 2.2K citations

Natural Sciences, Materials Engineering, Materials Science +12

Nanofabrication of Small Copper Clusters on Gold(111) Electrodes by a Scanning Tunneling Microscope

D.M. Kolb, Reinhard Ullmann, T. Will · Science · 1997 · 323 citations

Natural Sciences, Materials Engineering, Materials Science +17

Device Fabrication by Scanned Probe Oxidation

John A. Dagata · Science · 1995 · 156 citations

Natural Sciences, Materials Engineering, Materials Science +14

Noncontact nanolithography using the atomic force microscope

Kathryn Wilder, C. F. Quate, D. Adderton et al. · Applied Physics Letters · 1998 · 111 citations

Engineering, Materials Science, Actuators +13