Statistics
Publications
21
Citations
1K
H-Index
16
Active since
2004
Noritaka Kawasegi is an author at University of Toyama specializing in engineering, microfabrication, and materials science.
Publications per year
2004–2019
21
21
Etch stop of silicon surface induced by tribo-nanolithography
Noritaka Kawasegi, Noboru Morita, Shigeru Yamada et al. · Nanotechnology · 2005 · 60 citations
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