21
Publications
1K
Citations
16
H-Index
2004
Active since
Noritaka Kawasegi is an author at University of Toyama specializing in engineering, microfabrication, and materials science.
Top concepts
EngineeringMaterial ScienceMicrofabricationApplied PhysicsMechanical EngineeringSurface ScienceMicroelectronicsNanotechnologyMachining3D Printing
Publications per year
2004–2019
21
21
Etch stop of silicon surface induced by tribo-nanolithography
Noritaka Kawasegi, Noboru Morita, Shigeru Yamada et al. · Nanotechnology · 2005 · 60 citations
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1–5 of 21