Doping of III–V compound semiconductors by ion implantation

Laser and Electron Beam Interactions with Solids

N. Bloembergen, B. R. Appleton, G. K. Celler · MRS Bulletin · 1982 · 588 citations · Full text

Free-electron Lasers, Engineering, Physics +7

Compensation mechanisms in GaAs

G. M. Martin, J. Farges, Guy Jacob et al. · Journal of Applied Physics · 1980 · 320 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +15

Stoichiometric disturbances in ion implanted compound semiconductors

L. A. Christel, J. F. Gibbons · Journal of Applied Physics · 1981 · 248 citations

Semiconductors, Materials Science, Electrical Engineering +12

Channeling of medium-mass ions through silicon

F. H. Eisen · Canadian Journal of Physics · 1968 · 208 citations

Ion Implantation, Medium-mass Ions, Nuclear Physics +13

Semi-insulating III–v materials

P R Jay · Physics Bulletin · 1980 · 174 citations

Engineering, Semiconductor Physics, Solid State Subcommittee +18