Concepedia

A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling

Peter Fonda, Kazuo Nakamoto, Amir Heidari, Hsueh-An Yang, David A. Horsley, Liwei Lin, Kazuo Yamazaki

CIRP Annals · 2013 · 22 citations · 10 references

DOI

Concepts

References

10

Investigations on reduction of tool electrode wear in micro-EDM using novel electrode materials

Eckart Uhlmann, Markus Roehner · CIRP journal of manufacturing science and technology · 2008 · 87 citations

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Development of ultra-precision machining system with unique wire EDM tool fabrication system for micro/nano-machining

Xiang Cheng, Kazuo Nakamoto, M. Sugai et al. · CIRP Annals · 2008 · 77 citations

, , +11

Tool wear characteristics and their effects on nanoscale ductile mode cutting of silicon wafer

X.P. Li, Tianyiyi He, M. Rahman · Wear · 2005 · 69 citations

, , +16

Machining of three-dimensional microstructures in silicon by electro-discharge machining

Dominiek Reynaerts, Wim Meeusen, Hendrik Van Brussel · Sensors and Actuators A Physical · 1998 · 67 citations

, , +12

An experimental investigation into micro ball end-milling of silicon

Muhammad Shoaib Arif, Mustafizur Rahman, Wong Yoke San · Journal of Manufacturing Processes · 2011 · 53 citations

, , +14