Concepedia

Microfabrication Process Optimization

Microfabrication Process Optimization is a systematic methodology within MEMS fabrication that refines manufacturing parameters and sequences to enhance device performance, yield, and reproducibility while minimizing material waste, processing time, and cost.

121

Publications

5.2K

Citations

480

Authors

169

Institutions

Publications per year

2017–2026

33

Parents

Publications

121

Two-Dimensional Ti<sub>3</sub>C<sub>2</sub> MXene for High-Resolution Neural Interfaces

Nicolette Driscoll, Andrew G. Richardson, Kathleen Maleski et al. · ACS Nano · 2018 · 302 citations · Full text

, , +17

Micro-manufacturing: research, technology outcomes and development issues

Yi Qin, Andrew Brockett, Y. Ma et al. · The International Journal of Advanced Manufacturing Technology · 2009 · 234 citations · Full text

, , +14

An experimental study on micro-grinding process with nanofluid minimum quantity lubrication (MQL)

Pil-Ho Lee, Jung Soo Nam, Chengjun Li et al. · International Journal of Precision Engineering and Manufacturing · 2012 · 232 citations

, , +16

Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS

J Zhang, Kai Tan, Guha Hong et al. · Journal of Micromechanics and Microengineering · 2000 · 225 citations

, , +17

$\hbox{Bi}_{2}\hbox{Te}_{3}$-Based Flexible Micro Thermoelectric Generator With Optimized Design

W. Glatz, E. Schwyter, Lukas Durrer et al. · Journal of Microelectromechanical Systems · 2009 · 219 citations

, , +14

1–5 of 121

Authors

480

  1. CG
    Claudio Giardini

    University of Bergamo, Italy

    2 publications · 87 citations

    2

    h-index

  2. KY
    Kazuo Yamazaki

    University of California, Davis, United States

    2 publications · 68 citations

    2

    h-index

  3. XC
    Xueye Chen

    Liaoning University of Technology, China

    2 publications · 133 citations

    2

    h-index

  4. MM
    Muhammad Mubasher Saleem

    National University of Sciences and Technology, Pakistan

    2 publications · 61 citations

    2

    h-index

  5. RR
    Raafat R. Mansour

    University of Waterloo, Canada

    2 publications · 122 citations

    2

    h-index

1–5 of 480

Institutions

169

  1. Nanyang Technological University

    Singapore, Singapore

    4 h-index

    13 publications

    1.4K citations

  2. IBM (United States)

    Armonk, United States

    3 h-index

    4 publications

    143 citations

  3. University of Birmingham

    Birmingham, United Kingdom

    3 h-index

    9 publications

    309 citations

  4. University of California, Davis

    Davis, United States

    3 h-index

    14 publications

    518 citations

  5. Anna University, Chennai

    Chennai, India

    2 h-index

    3 publications

    63 citations

  6. National Institute Of Technology Silchar

    Silchar, India

    2 h-index

    4 publications

    140 citations

  7. Xi'an Jiaotong University

    Xi'an, China

    2 h-index

    17 publications

    1.3K citations

  8. Indian Institute of Technology Roorkee

    Roorkee, India

    2 h-index

    6 publications

    144 citations

1–8 of 169

Venues

  1. 13

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 7 publications · 506 citations

    7

    h-index

  3. Materials and Manufacturing Processes

    5 publications · 176 citations

    5

    h-index

  4. Microsystem Technologies

    4 publications · 166 citations

    4

    h-index

  5. Sensors and Actuators A Physical

    3 publications · 125 citations

    3

    h-index

1–5