Journal of Manufacturing Processes · 2011 · 53 citations · 18 references
EngineeringManufacturing EngineeringMaterials ScienceManufacturing ProcessesMaterials ProcessingMicrofabricationMachiningMems FabricationMicrofabrication ProcessesMicromachiningMicrostructure ControlSilicon MaterialsBall MillingMilling ProcessesSiliconSilicon MicromachiningSilicon Microstructures
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