CIRP journal of manufacturing science and technology · 2008 · 87 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSurface EngineeringElectrode MaterialsMachiningMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningWear-resistant MaterialsElectrode Degradation MechanismsElectrode Surface EngineeringElectrode WearMaterial Wear AnalysisTool Wear
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