Publication | Closed Access
Evaluation of the nanoindentation behaviors of SiGe epitaxial layer on Si substrate
24
Citations
39
References
2009
Year
Materials ScienceNanoindentation BehaviorsSi SubstrateEngineeringEpitaxial GrowthMicrofabricationSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationElectronic PackagingSige Epitaxial LayerMolecular Beam EpitaxySilicon On Insulator
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