Application of various optical techniques for ESD defect localization

F. Essely, F. Darracq, V. Pouget, M. Remmach, F. Beaudoin, Nicolas Guitard, Marise Bafleur, P. Perdu, A. Touboul, D. Lewis

Microelectronics Reliability · 2006 · 10 citations · 3 references

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