Growth and structural properties of SiGe virtual substrates on Si(100), (110) and (111) - Concepedia

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Growth and structural properties of SiGe virtual substrates on Si(100), (110) and (111)

44

Citations

25

References

2008

Year

V. Destefanis, Jean‐Michel Hartmann, Alexandra Abbadie, Anne‐Marie Papon, T. Billon

Journal of Crystal Growth

Materials ScienceStructural PropertiesEngineeringPhysicsSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSige Virtual SubstratesChemical Vapor Deposition

References

	Year	Citations

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