Large size MEMS scanning mirror with vertical comb drive for tunable optical filter

Electrostatic-comb drive of lateral polysilicon resonators

William C. Tang, Tu-Cuong H. Nguyen, Michael W. Judy et al. · Sensors and Actuators A Physical · 1990 · 454 citations

Engineering, Electrical Engineering, Materials Science +9

Optical MEMS for Lightwave Communication

Ming C. Wu, Olav Solgaard, Joseph E. Ford · Journal of Lightwave Technology · 2006 · 339 citations

Engineering, Communication, Electrical Engineering +17

Wavelength add-drop switching using tilting micromirrors

Joseph E. Ford, Vladimir Aksyuk, David J. Bishop et al. · Journal of Lightwave Technology · 1999 · 248 citations

Engineering, Electrical Engineering, Optics +16

Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators

Dooyoung Hah, Shanyong Huang, Jui-che Tsai et al. · Journal of Microelectromechanical Systems · 2004 · 127 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Vertical comb array microactuators

A. Selvakumar, K. Najafi · Journal of Microelectromechanical Systems · 2003 · 64 citations

Engineering, Electrical Engineering, Mechanical Engineering +17