Concepedia

Comb Drive Design

Comb Drive Design is a microelectromechanical system (MEMS) actuator design that employs interdigitated comb-like electrodes to generate electrostatic forces for in-plane motion, distinguished by its capacitive transduction mechanism and compatibility with surface micromachining fabrication processes.

88

Publications

3.3K

Citations

274

Authors

89

Institutions

Publications per year

2017–2026

6

Parents

Publications

88

Electrostatic-comb drive of lateral polysilicon resonators

William C. Tang, Tu-Cuong H. Nguyen, Michael W. Judy et al. · Sensors and Actuators A Physical · 1990 · 454 citations

, , +9

Optimal shape design of an electrostatic comb drive in microelectromechanical systems

Wenjing Ye, Subrata Mukherjee, Noel C. MacDonald · Journal of Microelectromechanical Systems · 1998 · 150 citations

, , +16

Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration

Yu Sun, Steven N. Fry, D.P. Potasek et al. · Journal of Microelectromechanical Systems · 2005 · 149 citations

, , +16

A CMOS-MEMS mirror with curled-hinge comb drives

Huikai Xie, Yingtian Pan, Gary K. Fedder · Journal of Microelectromechanical Systems · 2003 · 107 citations

, , +17

Statements on chaos control designs, including a fractional order dynamical system, applied to a “MEMS” comb-drive actuator

Ângelo Marcelo Tusset, José Manoel Balthazar, Dailhane G. Bassinello et al. · Nonlinear Dynamics · 2012 · 100 citations

, , +16

1–5 of 88

Authors

274

  1. HX
    Huikai Xie

    University of Florida, United States

    6 publications · 228 citations

    6

    h-index

  2. GK
    Gary K. Fedder

    Carnegie Mellon University, United States

    5 publications · 208 citations

    5

    h-index

  3. CL
    Chengkuo Lee

    National University of Singapore, Singapore

    4 publications · 168 citations

    4

    h-index

  4. SA
    Shorya Awtar

    University of Michigan, United States

    2 publications · 31 citations

    3

    h-index

  5. HS
    Harald Schenk

    Fraunhofer Institute for Photonic Microsystems, Germany

    3 publications · 77 citations

    3

    h-index

1–5 of 274

Institutions

89

  1. Carnegie Mellon University

    Pittsburgh, United States

    7 h-index

    14 publications

    592 citations

  2. University of California, Berkeley

    Berkeley, United States

    5 h-index

    10 publications

    385 citations

  3. University of Florida

    Gainesville, United States

    4 h-index

    5 publications

    200 citations

  4. Lawrence Livermore National Laboratory

    Livermore, United States

    4 h-index

    12 publications

    484 citations

  5. University of Michigan

    Ann Arbor, United States

    4 h-index

    7 publications

    149 citations

  6. University of California, Los Angeles

    Los Angeles, United States

    3 h-index

    9 publications

    266 citations

  7. National Tsing Hua University

    Hsinchu, Taiwan

    3 h-index

    6 publications

    251 citations

  8. Fraunhofer Institute for Photonic Microsystems

    Dresden, Germany

    3 h-index

    14 publications

    334 citations

1–8 of 89

Venues

  1. Journal of Microelectromechanical Systems

    11 publications · 690 citations

    12

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 11 publications · 346 citations

    11

    h-index

  3. Sensors and Actuators A Physical

    10 publications · 759 citations

    10

    h-index

  4. Microsystem Technologies

    5 publications · 68 citations

    5

    h-index

  5. 5

    h-index

1–5