Fabrication of diamond MISFET with micron-sized gate length on boron-doped (111) surface

Takeyasu Saito, Kyung-Ho Park, Kazuyuki Hirama, Hitoshi Umezawa, M Satoh, Hiroshi Kawarada, Hideyo Okushi

Diamond and Related Materials · 2005 · 11 citations · 21 references

Concepts

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