Statistics
Publications
19
Citations
1.1K
H-Index
15
Active since
1981
D.D. Rathman is an author at MIT Lincoln Laboratory specializing in engineering, materials science, and materials engineering.
Publications per year
1981–2013
19
19
Damage induced in Si by ion milling or reactive ion etching
S. W. Pang, D.D. Rathman, D. J. Silversmith et al. · Journal of Applied Physics · 1983 · 117 citations
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