Statistics
Publications
40
Citations
2.2K
H-Index
27
Active since
1969
D. J. Silversmith is an author at MIT Lincoln Laboratory specializing in applied physics, engineering, and electrical engineering.
Publications per year
1969–2010
40
40
Damage induced in Si by ion milling or reactive ion etching
S. W. Pang, D.D. Rathman, D. J. Silversmith et al. · Journal of Applied Physics · 1983 · 117 citations
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