40
Publications
2.2K
Citations
27
H-Index
1969
Active since
D. J. Silversmith is an author at MIT Lincoln Laboratory specializing in applied physics, engineering, and electrical engineering.
Top concepts
EngineeringApplied PhysicsElectrical EngineeringMaterial ScienceOptoelectronicsMicroelectronicsSurface SciencePhysicsThin FilmsSemiconductors
Publications per year
1969–2010
40
40
Damage induced in Si by ion milling or reactive ion etching
S. W. Pang, D.D. Rathman, D. J. Silversmith et al. · Journal of Applied Physics · 1983 · 117 citations
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