Determination of proximity effect parameters and the shape bias parameter in electron beam lithography

Proximity effect in electron-beam lithography

T. H. P. Chang · Journal of Vacuum Science and Technology · 1975 · 533 citations

Engineering, Electrical Engineering, Computational Electromagnetics +9

Point exposure distribution measurements for proximity correction in electron beam lithography on a sub-100 nm scale

S. A. Rishton, D. P. Kern · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 152 citations

Engineering, Electrical Engineering, Materials Science +14

Corrections to proximity effects in electron beam lithography. I. Theory

Mihir Parikh · Journal of Applied Physics · 1979 · 130 citations

Engineering, Electrical Engineering, Computational Physics +11

Energy deposition functions in electron resist films on substrates

Mihir Parikh, David F. Kyser · Journal of Applied Physics · 1979 · 101 citations

Engineering, Electrical Engineering, Materials Science +15

Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing

Sunao Aya, Koji Kise, Hideki Yabe et al. · Japanese Journal of Applied Physics · 1996 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +12