Sunao Aya

Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales

Ichiko Misumi, Satoshi Gonda, Qiangxian Huang et al. · Measurement Science and Technology · 2005 · 65 citations

Engineering, Microscopy, Measurement +19

Magnetization chirality due to asymmetrical structure in Ni-Fe annular dots for high-density memory cells

Ryoichi Nakatani, Tetsuo Yoshida, Yasushi Endo et al. · Journal of Applied Physics · 2004 · 34 citations

Magnetic Properties, Engineering, Low-dimensional Magnetism +26

Fabrication of x-ray masks for giga-bit DRAM by using a SiC membrane and W–Ti absorber

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Electron-beam Lithography, X-ray Masks +17

Magnetically pinned ring dots for spin valve or magnetic tunnel junction memory cells

Ryoichi Nakatani, Tetsuo Yoshida, Yasushi Endo et al. · Journal of Magnetism and Magnetic Materials · 2004 · 20 citations

Magnetism, Spintronics, Engineering +8

Sputtered W-Ti Film for X-Ray Mask Absorber

Hideki Yabe, Kenji Marumoto, Sunao Aya et al. · Japanese Journal of Applied Physics · 1992 · 19 citations

Engineering, X-ray Mask Application, Thin Film Process Technology +16