Concepedia

Hideki Yabe

HY

11

Publications

280

Citations

10

H-Index

1990

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Nippon Institute of Technology

Hideki Yabe is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsX-ray ImagingSurface ScienceMicrofabricationHealthMaterials EngineeringMaterials Fabrication

Publications per year

1990–2003

11

Publications

11

High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold

Yoshihiko Hirai, Satoshi Yoshida, Nobuyuki Takagi et al. · Japanese Journal of Applied Physics · 2003 · 80 citations

Nano Imprint Lithography, Engineering, Electron-beam Lithography +19

The Growth Mechanism of Diamond Crystals in Acetylene Flames

Yasuji Matsui, Hideki Yabe, Yoichi Hirose · Japanese Journal of Applied Physics · 1990 · 63 citations

Materials Science, Diamond-like Carbon, Chemical Engineering +14

Fabrication of x-ray masks for giga-bit DRAM by using a SiC membrane and W–Ti absorber

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Electron-beam Lithography, X-ray Masks +17

Sputtered W-Ti Film for X-Ray Mask Absorber

Hideki Yabe, Kenji Marumoto, Sunao Aya et al. · Japanese Journal of Applied Physics · 1992 · 19 citations

Engineering, X-ray Mask Application, Thin Film Process Technology +16

The numerical simulation of diamond synthesis from acetylene flames

Yasuji Matsui, Hideki Yabe, Yoichi Hirose · Diamond and Related Materials · 1993 · 17 citations

Diamond Synthesis, Engineering, Combustion Theory +5

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