Kenji Marumoto

A C-Band AlGaN/GaN HEMT with Cat-CVD SiN Passivation Developed for an Over 100 W Operation

Y. Kamo, T. Kunii, Hideo Takeuchi et al. · IEEE MTT-S International Microwave Symposium Digest, 2005. · 2005 · 26 citations

Wide-bandgap Semiconductor, Electrical Engineering, Engineering +13

Fabrication of x-ray masks for giga-bit DRAM by using a SiC membrane and W–Ti absorber

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Electron-beam Lithography, X-ray Masks +17

Sputtered W-Ti Film for X-Ray Mask Absorber

Hideki Yabe, Kenji Marumoto, Sunao Aya et al. · Japanese Journal of Applied Physics · 1992 · 19 citations

Engineering, X-ray Mask Application, Thin Film Process Technology +16

Low stress and optically transparent chromium oxide layer for x-ray mask making

J. Trube, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 17 citations

Optical Materials, Engineering, Electron-beam Lithography +20

Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing

Sunao Aya, Koji Kise, Hideki Yabe et al. · Japanese Journal of Applied Physics · 1996 · 17 citations

Engineering, X-ray Fluorescence, X-ray Imaging +17