Concepedia

Koji Kise

KK

4

Publications

62

Citations

4

H-Index

1994

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Koji Kise is an author at Mitsubishi Electric (Japan) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsHealthX-ray ImagingMaterial ScienceRadiologyMedical ImagingDosimetryThin FilmsCollimation

Publications per year

1994–1997

4

Publications

4

Fabrication of x-ray masks for giga-bit DRAM by using a SiC membrane and W–Ti absorber

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Electron-beam Lithography, X-ray Masks +17

Validity of Double and Triple Gaussian Functions for Proximity Effect Correction in X-ray Mask Writing

Sunao Aya, Koji Kise, Hideki Yabe et al. · Japanese Journal of Applied Physics · 1996 · 17 citations

Engineering, X-ray Fluorescence, X-ray Imaging +17

Total evaluation of W-Ti absorber for x-ray mask

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 14 citations

Engineering, Thin Film Process Technology, Cr Mask +16

A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask

Kaeko Kitamura, Hideki Yabe, Kei Sasaki et al. · Japanese Journal of Applied Physics · 1997 · 11 citations

Ultra Low, X-ray Spectroscopy, Engineering +16

Rows per page

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