Concepedia

Kaeko Kitamura

KK

2

Publications

31

Citations

2

H-Index

1996

Active since

Affiliations

Canon (Japan)(Current)

Kaeko Kitamura is an author at Canon (Japan) specializing in x-ray imaging, materials science, and applied physics.

Top concepts

EngineeringX-ray ImagingApplied PhysicsMaterial ScienceHealthMicrostructureMicroelectronicsMicrofabricationX-ray TechnologyX-ray Spectroscopy

Publications per year

1996–1997

2

Publications

2

Fabrication of x-ray masks for giga-bit DRAM by using a SiC membrane and W–Ti absorber

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Electron-beam Lithography, X-ray Masks +17

A Principle of Deposition of Ultra Low and Uniform Stress Absorber for X-Ray Mask

Kaeko Kitamura, Hideki Yabe, Kei Sasaki et al. · Japanese Journal of Applied Physics · 1997 · 11 citations

Ultra Low, X-ray Spectroscopy, Engineering +16

Rows per page

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