Silicon accelerometer based on thermopiles

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 507 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Integrated thermopile sensors

A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden et al. · Sensors and Actuators A Physical · 1990 · 120 citations

Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer

R.P. van Kampen, Michael J. Vellekoop, P.M. Sarro et al. · Sensors and Actuators A Physical · 1994 · 66 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

A novel accelerometer based on a silicon thermopile

R. Hiratsuka, D.C. van Duyn, T. Otaredian et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 34 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Design considerations for the thermal accelerometer

R. Hiratsuka, D.C. van Duyn, T. Otaredian et al. · Sensors and Actuators A Physical · 1992 · 21 citations

Engineering, Mechanical Engineering, Heat Transfer +13