Publication | Closed Access
Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer
66
Citations
7
References
1994
Year
Electrostatic FeedbackElectrical EngineeringEngineeringAccelerometerMechanical SystemsNano Electro Mechanical SystemActive Vibration ControlCritical DampingMicroelectronicsVibration ControlMicro-electromechanical System
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