Concepedia

R.P. van Kampen

RV

5

Publications

253

Citations

5

H-Index

1991

Active since

Affiliations

Delft University of Technology(Current)

R.P. van Kampen is an author at Delft University of Technology specializing in engineering, vibration control, and mechanical systems.

Top concepts

EngineeringVibration ControlMechanical SystemsMechatronicsInstrumentationMicroelectronicsMicrofabricationMechanical EngineeringMechanicsSensor Design

Publications per year

1991–1998

5

Publications

5

Modeling the mechanical behavior of bulk-micromachined silicon accelerometers

R.P. van Kampen, R.F. Wolffenbuttel · Sensors and Actuators A Physical · 1998 · 122 citations

Bulk-micromachined Silicon Accelerometers, Engineering, Micromachines +6

Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer

R.P. van Kampen, Michael J. Vellekoop, P.M. Sarro et al. · Sensors and Actuators A Physical · 1994 · 66 citations

Electrostatic Feedback, Electrical Engineering, Engineering +8

Effects of (110)-oriented corner compensation structures on membrane quality and convex corner integrity in (100)-silicon using aqueous KOH

R.P. van Kampen, R.F. Wolffenbuttel · Journal of Micromechanics and Microengineering · 1995 · 28 citations

Geometric Modeling, Convex Corner, Engineering +12

An integrable capacitive angular displacement sensor with improved linearity

R.F. Wolffenbuttel, R.P. van Kampen · Sensors and Actuators A Physical · 1991 · 24 citations

Engineering, Improved Linearity, Mechatronics +4

Bulk-Micromachined Capacitive Servo-Accelerometer

R.P. van Kampen · 1995 · 13 citations

Engineering, Micromachines, Microfabrication +8

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