Journal of Crystal Growth · 1997 · 80 citations · 36 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDopingIon ImplantationSemiconductor DefectsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsGallium NitrideGallium Nitride (Gan) MaterialsImplantation-induced Defect FormationIon Implantation EffectsN-type DopingSemiconductor Doping ProfilesSilicon Nitride
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