Nanoheteroepitaxial growth of GaN on Si nanopillar arrays

Abstract

Nanoheteroepitaxial growth of GaN by metal-organic chemical-vapor deposition on dense arrays of (111) Si nanopillars has been investigated. Scanning electron microscopy, cross-sectional transmission electron microscopy, and electron-diffraction analysis of 0.15-μm-thick GaN layers indicate single-crystal films. Most of the mismatch defects were in-plane stacking faults and the threading dislocation concentration was <108cm−2 at the interface and decreased away from the interface. High-resolution transmission electron microscopy indicated that grain-boundary defects could heal and were followed by high quality, single-crystal GaN. Facetted voids were also present at the GaN∕Si interface and are believed to be an additional strain-energy reduction mechanism. The unusual defect behavior in these samples appears to be related to the high compliance of the nanopillar silicon substrate.